Title:
REACTOR
Document Type and Number:
WIPO Patent Application WO/2010/113265
Kind Code:
A1
Abstract:
Disclosed is a reactor especially for converting tetrachlorosilane into trichlorosilane through a reaction with hydrogen, wherein the internal temperature can be maintained more uniformly. The reactor comprises a reaction chamber for producing a reaction product gas by reacting a raw material gas at a high temperature; an outer cylindrical case for housing the reaction chamber, which has a generally cylindrical bottomed main body and a top cover to be fitted to the upper opening of the main body; and a heater comprising a long resistive heating body which extends from the top cover of the outer cylindrical case toward the bottom of the outer cylindrical case through a space between the main body of the outer cylindrical case and the reaction chamber. The long resistive heating body has such a cross sectional gradient that cross sectional areas perpendicular to the longitudinal direction become smaller as closer to the bottom of the outer cylindrical case.
Inventors:
MATSUO YASUFUMI (JP)
TAKEMURA KOUICHI (JP)
WAKUDA YUSUKE (JP)
TAKEMURA KOUICHI (JP)
WAKUDA YUSUKE (JP)
Application Number:
PCT/JP2009/056674
Publication Date:
October 07, 2010
Filing Date:
March 31, 2009
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KK (JP)
MATSUO YASUFUMI (JP)
TAKEMURA KOUICHI (JP)
WAKUDA YUSUKE (JP)
MATSUO YASUFUMI (JP)
TAKEMURA KOUICHI (JP)
WAKUDA YUSUKE (JP)
International Classes:
B01J12/00; C01B33/107
Foreign References:
| JP2008137885A | 2008-06-19 | |||
| JP2000329475A | 2000-11-30 | |||
| US4208373A | 1980-06-17 |
Attorney, Agent or Firm:
SONODA, Yoshitaka et al. (JP)
Yoshitaka Sonoda (JP)
Yoshitaka Sonoda (JP)
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