RAW MATERIAL SUPPLY DEVICE AND LIGHT SOURCE DEVICE

WIPO Patent Application WO/2024/090019

A1

Provided are: a raw material supply device that can stably supply a plasma source; and a light source device.　A raw material supply device according to an aspect of the present invention is a raw material supply device for supplying a plasma source, which turns into plasma and generates radiation when irradiated with energy beams, into a decompression chamber, and the raw material supply device comprises a raw material tank and a supply control unit. The raw material tank holds the plasma source in a liquid state. The supply control unit has a supply pipe connecting the raw material tank and the decompression chamber and supplying the liquid plasma source held in the raw material tank to a storage container provided in the decompression chamber, and controls the supply of the liquid plasma source through the supply pipe.

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ASHIZAWA NORITAKA (JP)
HIRATA HIRONOBU (JP)

PCT/JP2023/031378

May 02, 2024

August 30, 2023

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USHIO DENKI KK (JP)

G03F7/20; H05G2/00

KIMURA Masayoshi (JP)

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