Title:
RAW MATERIAL GAS SUPPLY SYSTEM, POWDER RAW MATERIAL REPLENISHING MECHANISM, AND POWDER RAW MATERIAL REPLENISHING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/255102
Kind Code:
A1
Abstract:
A raw material gas supply system for supplying a raw material gas, which is generated by a vaporization device by vaporizing a powder raw material, to a processing device, wherein: a powder raw material replenishing mechanism for replenishing a powder raw material supply device, which supplies the powder raw material to the vaporization device, with the powder raw material has a pipe connected at one end to the powder raw material supply device, a powder raw material cartridge filled with the powder raw material, a connection part which is disposed on the other end side of the pipe and to which the powder raw material cartridge is detachably connected, an opening/closing part disposed on the other end side of the pipe and opening/closing between the pipe and the powder raw material cartridge, and an evacuation part for evacuating the inside of the pipe and keeping the inside of the pipe vacuum; the powder raw material cartridge is connected to the connection part in a state in which the inside of the pipe is kept vacuum by the evacuation part; and the powder raw material in the powder raw material cartridge is transferred to the powder raw material supply device when the opening/closing part is opened in said state.
Inventors:
KOMORI EIICHI (JP)
Application Number:
PCT/JP2022/020650
Publication Date:
December 08, 2022
Filing Date:
May 18, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C16/448; B01J4/00; B01J7/00
Foreign References:
| JPH07310185A | 1995-11-28 | |||
| JP2005118627A | 2005-05-12 | |||
| JPH11323557A | 1999-11-26 |
Attorney, Agent or Firm:
TAKAYAMA Hiroshi (JP)
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