Title:
PRODUCTION METHOD FOR OPTICAL SEMICONDUCTOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2024/058079
Kind Code:
A1
Abstract:
Provided is a production method for an optical semiconductor element having a good yield rate due to damage to a wafer by grinding being inhibited. Specifically provided is a production method for an optical semiconductor element, the production method having a step for forming a compound semiconductor layer laminate on one main surface of a compound semiconductor substrate having cleavability and a grinding step for grinding the other main surface of the substrate, wherein the skewness (Ssk) of the ground surface of the substrate in a surface roughness measurement is set to be positive immediately after the grinding step.
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Inventors:
KANEMOTO MAKO (JP)
NAKANO MASAYUKI (JP)
NAKANO MASAYUKI (JP)
Application Number:
PCT/JP2023/032925
Publication Date:
March 21, 2024
Filing Date:
September 08, 2023
Export Citation:
Assignee:
DOWA ELECTRONICS MATERIALS CO (JP)
International Classes:
H01L31/18; H01L21/304; H01L31/08; H01L33/00
Domestic Patent References:
WO2022009375A1 | 2022-01-13 | |||
WO2022054644A1 | 2022-03-17 | |||
WO2019065397A1 | 2019-04-04 |
Foreign References:
JP2011055014A | 2011-03-17 | |||
JP2020057799A | 2020-04-09 | |||
JPH08321445A | 1996-12-03 | |||
JP2013149746A | 2013-08-01 | |||
US20130244359A1 | 2013-09-19 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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