Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/054280
Kind Code:
A1
Abstract:
This processing device is provided with: a rotatable chuck (23) that holds a processing tool (24); a chuck plate (1) that holds an object to be processed (W); rotors (4, 5, 6, 12, 13) to which the chuck plate (1) is attached and which have a driven-side magnet (13) for magnetic coupling; a hydrostatic gas bearing (2) that rotatably supports the rotors (4, 5, 6, 12, 13); an inclination adjustment means that adjusts the orientation of the hydrostatic gas bearing (2); a motor (18); and transmission means (14, 17) that transmit rotational driving force of the motor (18) to the driving-side magnet (16) for magnetic coupling.
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Inventors:
SAWAGUCHI KAZUYA (JP)
OKUDA MANABU (JP)
OKUDA MANABU (JP)
Application Number:
PCT/JP2018/033112
Publication Date:
March 21, 2019
Filing Date:
September 06, 2018
Export Citation:
Assignee:
CANON SEMICONDUCTOR EQUIPMENT INC (JP)
International Classes:
B24B7/04; B24B41/06; B24B41/047; F16C32/06; F16H49/00; H01L21/304
Foreign References:
| JP2010188433A | 2010-09-02 | |||
| JP2009095913A | 2009-05-07 | |||
| JP2009195994A | 2009-09-03 | |||
| JP2008264913A | 2008-11-06 | |||
| JP2013038952A | 2013-02-21 | |||
| JP2013013216A | 2013-01-17 | |||
| JPH08229759A | 1996-09-10 | |||
| JP2016504549A | 2016-02-12 |
Attorney, Agent or Firm:
CHIKASHIMA,Kazuo et al. (JP)
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