Title:
PRECISE POSITIONING DEVICE AND OPTICAL APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/053119
Kind Code:
A1
Abstract:
[Problem] To provide a precise positioning device that makes it possible to control light with very low intensity such as a photon, and an optical apparatus using the same. [Solution] A precise positioning device 1 comprises an optical element 2 and a support part 3 that supports the optical element 2. The support part 3 has a first structure 51 and a second structure 52, a plurality of first piezoelectric actuators 61 are provided between the first structure 51 and the optical element 2, and a plurality of second piezoelectric actuators 62 are provided between the first structure 51 and the second structure 52. Consequently, the support part 3 is configured to make it possible for the optical element 2 to rotate around an X-axis, a Y-axis, and a Z-axis as rotation axes, and move in a Y-axis direction and a Z-axis direction.
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Inventors:
NISHINO HITOSHI (JP)
Application Number:
PCT/JP2022/038840
Publication Date:
March 14, 2024
Filing Date:
October 19, 2022
Export Citation:
Assignee:
TAMAGAWA HOLDINGS CO LTD (JP)
International Classes:
G02B7/198; G02B7/00; G02B26/08
Foreign References:
| US20210075180A1 | 2021-03-11 | |||
| JP2014154698A | 2014-08-25 | |||
| JPH07509787A | 1995-10-26 |
Attorney, Agent or Firm:
FUJIKI Hiroshi et al. (JP)
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