Title:
POSITION DETERMINATION METHOD AND POSITION DETERMINATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/084853
Kind Code:
A1
Abstract:
The present description discloses techniques for highly accurately determining the position of a substrate. This position determination method comprises: a step for setting a region including an end portion of a substrate in a reference image as a reference region, and detecting a pixel position of the end portion of the substrate in the reference region as a reference pixel position; a step for setting a region including the end portion of the substrate in a comparison image as a comparison region, and detecting the pixel position of the end portion of the substrate in the comparison region as a comparison pixel position; and a step for determining whether the difference between the reference pixel position and the comparison pixel position is greater than a predetermined threshold value.
Inventors:
SHIMIZU SHINJI (JP)
YAMADA RYO (JP)
MASUI TATSUYA (JP)
DEBA YUICHI (JP)
MIYAWAKI MIWA (JP)
YAMADA RYO (JP)
MASUI TATSUYA (JP)
DEBA YUICHI (JP)
MIYAWAKI MIWA (JP)
Application Number:
PCT/JP2023/032642
Publication Date:
April 25, 2024
Filing Date:
September 07, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/68; H01L21/304
Domestic Patent References:
| WO2013163791A1 | 2013-11-07 |
Foreign References:
| KR20190008496A | 2019-01-24 | |||
| JP2014239093A | 2014-12-18 | |||
| JP2013110270A | 2013-06-06 | |||
| US20160293471A1 | 2016-10-06 | |||
| JP2015152475A | 2015-08-24 | |||
| JP2022078570A | 2022-05-25 | |||
| JP2016100565A | 2016-05-30 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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