Title:
POROUS MATERIAL AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2024/074141
Kind Code:
A1
Abstract:
Embodiments of the present application provide a porous material and an application thereof. The porous material may be applied to storage and delivery of fluorine-containing electronic specialty gases. The porous material comprises a metal ion or cluster and an organic ligand, wherein the metal ion or cluster and/or the organic ligand are/is provided with a halogen group, and the halogen group is a group containing at least one element of fluorine, chlorine, bromine, and iodine. The porous material is used as a medium for storage and delivery of fluorine-containing electronic specialty gases, and has a functional surface having relatively weak interaction with a fluorine-containing electronic specialty gas, such that the fluorine-containing electronic specialty gas can be desorbed from the porous material, thereby implementing high-efficiency delivery of the fluorine-containing electronic specialty gas. The embodiments of the present application further provide a gas storage container, a gas storage and delivery system, and a fluorine-containing electronic specialty gas delivery method.
Inventors:
XING HUABIN (CN)
XU HUALI (CN)
YANG LIFENG (CN)
CUI XILI (CN)
ZHOU LIN (CN)
QIU ZHENSONG (CN)
XU HUALI (CN)
YANG LIFENG (CN)
CUI XILI (CN)
ZHOU LIN (CN)
QIU ZHENSONG (CN)
Application Number:
PCT/CN2023/123278
Publication Date:
April 11, 2024
Filing Date:
October 07, 2023
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
C08G83/00; B01D53/02; B01J20/22
Foreign References:
| CN103100372A | 2013-05-15 | |||
| CN105813711A | 2016-07-27 | |||
| CN111187423A | 2020-05-22 | |||
| CN112280054A | 2021-01-29 | |||
| CN112979978A | 2021-06-18 | |||
| CN113248727A | 2021-08-13 | |||
| CN113278159A | 2021-08-20 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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