Title:
POLISHING DEVICE AND METHOD FOR DETECTING POLISHING END POINT IN POLISHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/162478
Kind Code:
A1
Abstract:
The present invention accurately detects the end point of polishing. This polishing device comprises: a polishing table for holding a polishing pad; a holder for holding an object to be polished so as to face the polishing pad; at least one of a motor for rotationally driving the polishing table, a motor for rotating the holder holding the object, and a motor for rocking the holder holding the object; one or more drivers that are configured so as to supply drive current to the at least one motor and further output a digital signal according to the load of the at least one motor; and an end point detection unit that detects a polishing end point, which indicates the end of polishing of the object, on the basis of the digital signal output from the drivers.
Inventors:
YOSHINARI DAI (JP)
YAMAGUCHI KUNIAKI (JP)
YAMAGUCHI KUNIAKI (JP)
Application Number:
PCT/JP2023/000030
Publication Date:
August 31, 2023
Filing Date:
January 05, 2023
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
B24B37/32; B24B37/013; B24B49/16; H01L21/304
Foreign References:
| JP2021517359A | 2021-07-15 | |||
| JP2015519740A | 2015-07-09 | |||
| JP2019162716A | 2019-09-26 |
Attorney, Agent or Firm:
MIYAMAE, Toru et al. (JP)
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