PLASMA ULTRA-CLEANING TREATMENT METHOD, SYSTEM, APPARATUS AND MEDIUM

WIPO Patent Application WO/2024/087570

A1

A plasma ultra-cleaning treatment method, a system, an apparatus (100), and a medium. The apparatus (100) comprises a treatment tank (110), an air extraction apparatus (130), a plasma generator (150), a conveying apparatus (140), and a control module (160); the treatment tank (110) comprises multiple interfaces having air valves, the multiple interfaces having air valves each being connected to the air extraction apparatus (130) and one end of the conveying apparatus (140); the other end of the conveying apparatus (140) is connected to the plasma generator (150); the treatment tank (110) comprises at least one temperature sensor; the air extraction apparatus (130) is configured to extract gas from the treatment tank (110); the conveying apparatus (140) is configured to convey plasma gas generated by the plasma generator (150) into the treatment tank (110); and the control module (160) is configured to control the air extraction apparatus (130) to execute an air extraction action, control the conveying action of the conveying apparatus (140), control starting and stopping of the plasma generator (150), and control the opening and closing of the air valves.

WO/2011/142499	CYLINDRICAL HIGH-PRESSURE TREATMENT APPARATUS
JP2000510053	[Title of the Invention] A method for cleaning electronic hardware parts

CHANG HUAMEI (CN)
SHI ZHENPING (CN)

PCT/CN2023/092566

May 02, 2024

May 06, 2023

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JIANGSU ROZEN MEDICAL TECH CO LTD (CN)

B08B7/00; B08B13/00

ANHUI FANMOU YOUDAO IP CO., LTD. (GENERAL PARTNERSHIP) (CN)

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