Title:
PLASMA SOURCE, ION SOURCE, AND ION GENERATING METHOD
Document Type and Number:
WIPO Patent Application WO/2006/085576
Kind Code:
A1
Abstract:
A thermal electrode for generating ions by spraying steam or gas containing atoms to be ionized onto the surface thereof. A thermal electrode (1) constituted of layers of metal sheets each having a plurality of openings significantly increases the steam-containing surface area of the thermal electrode to thereby enhance an ionizing efficiency and enable a large ion current to be picked up. A thermal electrode constituted of fine tungsten wires or the like can produce heat when a current is delivered to the thermal electrode itself without the need of heating the thermal electrode by a heater, thereby giving the effect of improving a heat energy utilizing efficiency.
Inventors:
KASAMA YASUHIKO (JP)
OMOTE KENJI (JP)
YOKOH KUNIYOSHI (JP)
KOMATSU KENICHIRO (JP)
OMOTE KENJI (JP)
YOKOH KUNIYOSHI (JP)
KOMATSU KENICHIRO (JP)
Application Number:
PCT/JP2006/302243
Publication Date:
August 17, 2006
Filing Date:
February 09, 2006
Export Citation:
Assignee:
IDEAL STAR INC (JP)
KASAMA YASUHIKO (JP)
OMOTE KENJI (JP)
YOKOH KUNIYOSHI (JP)
KOMATSU KENICHIRO (JP)
KASAMA YASUHIKO (JP)
OMOTE KENJI (JP)
YOKOH KUNIYOSHI (JP)
KOMATSU KENICHIRO (JP)
International Classes:
B01J19/08; C01B31/02; C01D15/00; H01J27/26; H01J37/08; H01J37/317
Foreign References:
| JPS473600A | ||||
| JPH10265944A | 1998-10-06 |
Attorney, Agent or Firm:
Fukumori, Hisao (5-11 Kudanminami 4-chom, Chiyoda-ku Tokyo 74, JP)
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