Title:
PELLICLE COMPLEX AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/008977
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide: a pellicle complex that has fewer out-gassing occurrences; and a production method for the pellicle complex. This pellicle complex has a pellicle membrane (A) and a pellicle frame (B) joined to the pellicle membrane (A) along an outer periphery of the pellicle membrane (A), and is characterized in that the pellicle membrane (A) is a carbon membrane, the pellicle frame (B) contains at least one metal element selected from the group consisting of Ni, Fe, Mo, Ti, Mn, Ta, W, and V, and a carbon and metal element-containing layer (C) containing carbon and at least one metal element exists at the interface between the pellicle membrane (A) and the pellicle frame (B).
Inventors:
MURASHIMA KENSUKE (JP)
MURAKAMI MUTSUAKI (JP)
MURAKAMI MUTSUAKI (JP)
Application Number:
PCT/JP2019/025423
Publication Date:
January 09, 2020
Filing Date:
June 26, 2019
Export Citation:
Assignee:
KANEKA CORP (JP)
International Classes:
G03F1/62; G03F1/64
Domestic Patent References:
| WO2014142125A1 | 2014-09-18 |
Foreign References:
| JP2015018228A | 2015-01-29 | |||
| JP2009271262A | 2009-11-19 | |||
| JP2016130789A | 2016-07-21 |
Attorney, Agent or Firm:
USFI PATENT ATTORNEYS INTERNATIONAL OFFICE (JP)
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