Title:
PARTICLE SEPARATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/157814
Kind Code:
A1
Abstract:
The purpose of the present disclosure is to provide a technology that can ensure the reliability of an inspection even when there is a possibility that an inhibition ion that inhibits detection of target particles is contained. The particle separation apparatus according to the present disclosure comprises a gas separation apparatus that separates target particles from a gas. The gas separation apparatus comprises, separately from a first discharge port that discharges the separated target particles, a second discharge port that discharges the gas from which the target particles have been separated (see FIG. 1).
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Inventors:
SHISHIKA TSUKASA (JP)
YOSHIOKA SHINJI (JP)
YOSHIE MASAKI (JP)
YOSHIOKA SHINJI (JP)
YOSHIE MASAKI (JP)
Application Number:
PCT/JP2021/001552
Publication Date:
July 28, 2022
Filing Date:
January 19, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
B01D45/12; B01D50/00; B04C9/00
Foreign References:
| JPH04346857A | 1992-12-02 | |||
| JP2019178942A | 2019-10-17 | |||
| JP2020179341A | 2020-11-05 | |||
| JP2017215174A | 2017-12-07 | |||
| JP2003336080A | 2003-11-28 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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