Title:
ORIFICE-BUILT-IN VALVE
Document Type and Number:
WIPO Patent Application WO/2001/094824
Kind Code:
A1
Abstract:
An orifice-built-in valve capable of implementing an excellent flow rate control characteristics by reducing the production costs of an orifice-built-in valve used for a gas supply device or the like provided with a pressure-type flow controller used in a semiconductor production device and a chemicals production facility, by improving an orifice machining precision and by preventing an orifice deformation at valve assembling. The orifice-built-in valve mainly comprises a valve body made of a heat-resisting material and formed with a gas flow-in path and a gas flow-out path communicating with a valve chest opened at the top thereof, a synthetic-resin-made valve seat body provided in the valve chest of the valve body and formed with a gas flow-out path communicating with the gas flow-out path of the valve body and a valve seat, a heat-resisting-material-made orifice disc detachably provided in the gas flow-out path of the valve seat body, and an orifice formed in the orifice disc, for throttling the gas flow-out path of the valve seat body.
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Inventors:
OHMI TADAHIRO (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
DOHI RYOUSUKE (JP)
IDETA EIJI (JP)
HIROSE TAKASHI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
DOHI RYOUSUKE (JP)
IDETA EIJI (JP)
HIROSE TAKASHI (JP)
Application Number:
PCT/JP2000/003657
Publication Date:
December 13, 2001
Filing Date:
June 05, 2000
Export Citation:
Assignee:
FUJIKIN KK (JP)
OHMI TADAHIRO (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
DOHI RYOUSUKE (JP)
IDETA EIJI (JP)
HIROSE TAKASHI (JP)
OHMI TADAHIRO (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
DOHI RYOUSUKE (JP)
IDETA EIJI (JP)
HIROSE TAKASHI (JP)
International Classes:
F04F1/08; F16K7/14; F16K7/16; F16K25/00; F16K27/00; F16K31/02; F16K47/00; H04B17/00; H04W4/90; H04W74/08; H04W48/12; (IPC1-7): F16K47/08
Foreign References:
| JPH0333566A | 1991-02-13 | |||
| JPS6396369A | 1988-04-27 | |||
| JPS6396367A | 1988-04-27 | |||
| JPS62161050A | 1987-07-17 | |||
| JPH07139649A | 1995-05-30 | |||
| JPH0329515U | 1991-03-25 | |||
| JPH10332003A | 1998-12-15 | |||
| JPS5642767B2 | 1981-10-07 |
Other References:
See also references of EP 1300619A4
Attorney, Agent or Firm:
Sugimoto, Takeo (Kitahama 2-chome Chuo-ku Osaka-shi, Osaka, JP)
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