Title:
ONLINE DETECTION METHOD AND SYSTEM FOR SURFACE CONDITION OF POLISHING PAD
Document Type and Number:
WIPO Patent Application WO/2023/138421
Kind Code:
A1
Abstract:
An online detection method and system for the surface condition of a polishing pad. The online detection method comprises the following steps: an optical sensor (1) moving above a polishing pad (2), so as to acquire distance information between the optical sensor (1) and the surface of the polishing pad (2); according to the measured distance information, distinguishing distribution conditions of liquid on the surface of the polishing pad (2), and correspondingly using different correction calculation formulas to calculate a depth value of a trench (21) in the surface of the polishing pad (2); comparing a corrected depth value of the trench (21) in the surface of the polishing pad (2) with a preset threshold value; and determining the depth condition of the trench (21) in the surface of the polishing pad (2), so as to determine whether the polishing pad (2) needs to be replaced.
Inventors:
YANG ZHE (CN)
ZHOU YUANPENG (CN)
CAI NINGYUAN (CN)
ZHOU YUANPENG (CN)
CAI NINGYUAN (CN)
Application Number:
PCT/CN2023/071164
Publication Date:
July 27, 2023
Filing Date:
January 09, 2023
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
B24B37/005; B24B37/26; B24B49/12; H01L21/66
Foreign References:
| CN114083427A | 2022-02-25 | |||
| JP2017072583A | 2017-04-13 | |||
| CN110303426A | 2019-10-08 | |||
| US20130217306A1 | 2013-08-22 | |||
| CN109834577A | 2019-06-04 | |||
| CN110026885A | 2019-07-19 |
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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