Title:
NON-CONTACT SUPPORT DEVICE AND NON-CONTACT SUPPORT METHOD
Document Type and Number:
WIPO Patent Application WO/2014/129567
Kind Code:
A1
Abstract:
Provided are a non-contact support device and a non-contact support method whereby the flying height of an object to be supported can be controlled with greater precision. This non-contact support method supports an object to be supported without contact by discharging a gas. In the non-contact support method or a non-contact support device for performing this method, main suction is performed to apply suction force to the object to be supported extending into a treatment area where the object to be supported is treated, first preparatory suction is performed to apply suction force upstream of the treatment area relative to a conveying direction in which the object to be supported is conveyed, and the main suction and the first preparatory suction are performed independent of each other.
Inventors:
TSUNODA KOUICHI (JP)
ITO AKIHIKO (JP)
YASUDA TAKAHIRO (JP)
OZAWA HIDEO (JP)
ITO AKIHIKO (JP)
YASUDA TAKAHIRO (JP)
OZAWA HIDEO (JP)
Application Number:
PCT/JP2014/054096
Publication Date:
August 28, 2014
Filing Date:
February 21, 2014
Export Citation:
Assignee:
OILES INDUSTRY CO LTD (JP)
International Classes:
B65G49/06; B65G49/07; F16C32/06; H01L21/677
Foreign References:
| JP2010232472A | 2010-10-14 | |||
| JP2012190890A | 2012-10-04 |
Attorney, Agent or Firm:
KIMIYA, Naoki (JP)
Naoki Kinomiya (JP)
Naoki Kinomiya (JP)
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