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Title:
NITRIDE-BASED SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THEREOF
Document Type and Number:
WIPO Patent Application WO/2024/060110
Kind Code:
A1
Abstract:
A nitride-based semiconductor device includes a first III-V nitride-based semiconductor layer, a second III-V nitride-based semiconductor layer, a source electrode and a drain electrode, and a doped nitride-based semiconductor layer. The second III-V nitride-based semiconductor layer is disposed over the first III-V nitride-based semiconductor layer and has a bandgap higher than a bandgap of the first III-V nitride-based semiconductor layer. The source electrode and the drain electrode are disposed over the second III-V nitride-based semiconductor layer. The doped nitride-based semiconductor layer is disposed over the second III-V nitride-based semiconductor layer and between the source electrode and the drain electrode, in which the doped nitride-based semiconductor layer has an aluminum concentration increasing along an upward direction. The gate electrode is disposed over the doped nitride-based semiconductor layer.

Inventors:
HAO RONGHUI (CN)
WONG KING YUEN (CN)
Application Number:
PCT/CN2022/120410
Publication Date:
March 28, 2024
Filing Date:
September 22, 2022
Export Citation:
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Assignee:
INNOSCIENCE SUZHOU SEMICONDUCTOR CO LTD (CN)
International Classes:
H01L29/778
Foreign References:
US20090072272A12009-03-19
CN105990106A2016-10-05
CN104393045A2015-03-04
CN104465748A2015-03-25
CN102800572A2012-11-28
CN101107713A2008-01-16
Attorney, Agent or Firm:
BEIJING BESTIPR INTELLECTUAL PROPERTY LAW CORPORATION (CN)
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