Title:
MOUNTING DEVICE, MOUNTING METHOD, AND MOUNTING CONTROL PROGRAM
Document Type and Number:
WIPO Patent Application WO/2024/084789
Kind Code:
A1
Abstract:
Provided is a mounting device comprising a mounting control unit which: recognizes a reference position of a mounted body on the basis of a worms eye view image output from a worms eye view imaging unit that is caused to image a mounting surface of the mounted body with the position of a mounting tool adjusted such that an index surface of a calibration index, which is disposed to be imageable by the worms eye view imaging unit and a birds eye view imaging unit adopting a Scheimpflug optical system, is at the same height as the mounting surface; adjusts the position of a stage so that a surface to be mounted onto in a placement-planned region is at the same height as the index surface; and causes the mounting surface to be mounted onto the surface to be mounted onto on the basis of the recognized reference position. The mounting device makes it possible to accurately determine a target position for placing each mounted body using an imaging unit adopting a Scheimpflug optical system, even if the temperature of the surrounding environment is varied and even when a plurality of mounted bodies, such as semiconductor chips, are mounted in a stack, thus making it possible to place and mount the mounted body at the target position on a substrate or on another mounted body.
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Inventors:
SEYAMA KOHEI (JP)
Application Number:
PCT/JP2023/029798
Publication Date:
April 25, 2024
Filing Date:
August 18, 2023
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
H01L21/52
Domestic Patent References:
| WO2020026563A1 | 2020-02-06 | |||
| WO2022153518A1 | 2022-07-21 |
Foreign References:
| JP2004128384A | 2004-04-22 | |||
| JP2014179560A | 2014-09-25 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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