Title:
MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING DEVICE, AND FLAT DISPLAY MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/129190
Kind Code:
A1
Abstract:
Provided is a motor capable of more reliably preventing internally generated dust from flowing out to the outside. The motor 1 has: a stator 21; a rotor 22; a rotor housing 42 rotating together with the rotor 22; a stator housing 41 having the stator 21 fixed thereto, provided with spaces 100A, 100B between the stator housing 41 and the rotor housing 42, and overlapping with the rotor housing 42 over the entire circumference in the circumferential direction at first distances 6A, 6B; circular ring members 10, 18 overlapping with the stator housing 41 over the entire circumference in the circumferential direction at second distances 8A, 8B in the spaces 100A, 100B; discharge holes 13A, 13B for suctioning and discharging air inside the spaces 100A, 100B via the second distances 8A, 8B; and discharge trenches 12A, 12B interposed between the second distances 8A, 8B and the discharge holes 13A, 13B and provided in the stator housing 41 over the entire circumference in the circumferential direction along the second distances 8A, 8B.
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Inventors:
HIGUCHI HIDEYA (JP)
NAKAMURA TSUYOSHI (JP)
WATANABE HAYAO (JP)
NAKAMURA TSUYOSHI (JP)
WATANABE HAYAO (JP)
Application Number:
PCT/JP2015/086077
Publication Date:
August 18, 2016
Filing Date:
December 24, 2015
Export Citation:
Assignee:
NSK LTD (JP)
International Classes:
H02K5/10; F16C35/067; F16C35/07
Foreign References:
| JPH0439053U | 1992-04-02 | |||
| JP2012213259A | 2012-11-01 | |||
| JP2006187072A | 2006-07-13 | |||
| JP2007166694A | 2007-06-28 | |||
| JPS5644362A | 1981-04-23 |
Other References:
See also references of EP 3258577A4
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Patent business corporation Sakai international patent firm (JP)
Patent business corporation Sakai international patent firm (JP)
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