MONOCRYSTALLINE THIN FILM, METHOD FOR MANUFACTURING SAME, AND PRODUCT USING SAME

WIPO Patent Application WO/2020/091425

A1

The present invention relates to: a monocrystalline thin film having excellent crystal orientation; a method for manufacturing same; and a semiconductor device, a battery device, a superconducting wire, and a superconducting product, each comprising the monocrystalline thin film. The subject matter of the present invention is to provide: a monocrystalline thin film which is formed by depositing a second polycrystalline material on a substrate made of a first polycrystalline material and has, at grain boundaries, the crystal orientation satisfying relationship 1 below; a method for manufacturing same; and a semiconductor device, a battery device, a superconducting wire, and a superconducting product, each comprising the monocrystalline thin film. [Relationship 1] 0° < FWHM2 ≤ 3° (where, FWHM2 denotes the full width at half maximum of a distribution curve of misorientation angles at grain boundaries of the thin film.)

KIM HO SUP (KR)
OH SANG SOO (KR)
HA HONG SOO (KR)
JO JEONG HYEON (KR)
KIM GWAN TAE (KR)
NOH HYUN WOO (KR)

PCT/KR2019/014492

May 07, 2020

October 30, 2019

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KERI KOREA ELECTROTECHNOLOGY RES INST (KR)

C23C14/16; C21D6/00; C22C38/10; C23C14/02; C23C14/24; C30B30/00; H01L39/12; H01L39/24

US7220315B2	2007-05-22
JPH0737822A	1995-02-07
JP2014077166A	2014-05-01
JPH05254994A	1993-10-05
KR20100004098A	2010-01-12

PUKYUNG INTERNATIONAL PATENT & LAW FIRM (KR)

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