MINUTE ELECTROMECHANICAL ACTUATION AND FLUID CONTROL DEVICES AND INTEGRATED SYSTEMS BASED ON LOW TEMPERATURE CO-FIRED CERAMIC (LTCC) TAPE TECHNOLOGY

Title:

MINUTE ELECTROMECHANICAL ACTUATION AND FLUID CONTROL DEVICES AND INTEGRATED SYSTEMS BASED ON LOW TEMPERATURE CO-FIRED CERAMIC (LTCC) TAPE TECHNOLOGY

Document Type and Number:

WIPO Patent Application WO2001035484

Kind Code:

A9

Abstract:

Disclosed are minute electromechanical devices (10, 11, 12), as electromagnetic actuators, pressure transducers, pumps and valves, which are conveniently fabricated from ceramic tape to yield monolithic ceramic and hybrid structures.

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Inventors:

BAU HAIM H (US)
SANTIAGO-AVILES JORGE J (US)
KIM MOON (US)
ANANTHASURESH SURESH G K (US)
GONGORA-RUBIO MARIO (BR)
LYNCH HEATHER (US)

Application Number:

PCT/US2000/030441

Publication Date:

August 15, 2002

Filing Date:

November 03, 2000

Export Citation:

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Assignee:

UNIV PENNSYLVANIA (US)
BAU HAIM H (US)
SANTIAGO-AVILES JORGE J (US)
KIM MOON (US)
ANANTHASURESH SURESH G K (US)
GONGORA-RUBIO MARIO (BR)
LYNCH HEATHER (US)

International Classes:

B81B3/00; F04B7/00; F04B43/04; F15C5/00; F16K99/00; H01H50/00; H01P1/12; (IPC1-7): H01P1/10; H01H51/22

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