Title:
MICROPHONE CHIP
Document Type and Number:
WIPO Patent Application WO/2024/040649
Kind Code:
A1
Abstract:
The present application relates to a microphone chip, comprising: a substrate with a front cavity, and a capacitance system, which is arranged on and connected to the substrate. The capacitance system comprises a diaphragm located at an upper part of the substrate and a back plate spaced apart from the diaphragm, wherein an air gap is formed between the diaphragm and the back plate, and the diaphragm and the back plate are connected to the substrate by means of a fixing portion. The diaphragm comprises an inner diaphragm portion, an outer diaphragm portion and a supporting portion, wherein the inner diaphragm portion and the outer diaphragm portion are spaced apart by a slit, and the supporting portion is connected to the fixing portion. The microphone chip further comprises a sealing piece, which is connected to the back plate, located between the back plate and the diaphragm, and arranged near the periphery of the inner diaphragm portion. In the microphone chip, the inner diaphragm portion and the outer diaphragm portion are spaced apart by the slit, and the supporting portion is connected to the fixing portion to fix the diaphragm, so that the diaphragm is cantilevered; and by arranging the sealing piece between the back plate and the diaphragm, the inner diaphragm portion is attracted onto the sealing piece by means of an electrostatic force, the sealing piece supports the inner diaphragm portion to achieve an operating state, and low attenuation of a microphone is reduced.
Inventors:
WANG KAIJIE (CN)
ZHAO ZHUANZHUAN (CN)
ZHAO ZHUANZHUAN (CN)
Application Number:
PCT/CN2022/119299
Publication Date:
February 29, 2024
Filing Date:
September 16, 2022
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/00
Foreign References:
| CN107484051A | 2017-12-15 | |||
| CN114885264A | 2022-08-09 | |||
| CN207910959U | 2018-09-25 | |||
| CN101841758A | 2010-09-22 | |||
| US20060280319A1 | 2006-12-14 | |||
| CN214177566U | 2021-09-10 |
Attorney, Agent or Firm:
UNI-INTEL PATENT AND TRADEMARK LAW FIRM (CN)
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