MICROMACHINE SWITCH AND ITS PRODUCTION METHOD

Title:

MICROMACHINE SWITCH AND ITS PRODUCTION METHOD

Document Type and Number:

WIPO Patent Application WO/2000/038208

Kind Code:

A1

Abstract:

A micromachine which can be mass-produced, is cheap, and has high performance. The machine comprises a support member (7) provided near a gap of a signal line on a base (1) and has a predetermined height from the surface of the base (1), a flexible beam member (cantilevered arm (8)) which projects from the support member (7) generally parallel to the surface of the base (1) and part of which faces to the gap, a contact electrode (5) provided on the base side of the beam member and facing to at least the gap, and a lower electrode (4) provided on the base (1) and facing to part of the beam member. The beam member is conductive from the portion connected to the support member (7) to the portion facing to the lower electrode (4) and consequently functions as an upper electrode (9). The thermal expansion coefficient is generally symmetric in the direction of the thickness perpendicular to the surface of the base (1) at least in the region from the portion connected to the support member (7) to the portion facing to the lower electrode (4).

Inventors:

SUZUKI KENICHIRO (JP)
ARA YOUICHI (JP)
CHEN SHUGUANG (JP)

Application Number:

PCT/JP1999/007077

Publication Date:

June 29, 2000

Filing Date:

December 16, 1999

Export Citation:

Click for automatic bibliography generation Help

Assignee:

NEC CORP (JP)
SUZUKI KENICHIRO (JP)
ARA YOUICHI (JP)
CHEN SHUGUANG (JP)

International Classes:

H01H11/00; B62D57/00; B81B3/00; B81B7/04; B81C1/00; H01H1/02; H01H1/26; H01H59/00; H01H1/20; (IPC1-7): H01H59/00; B81B3/00; B81C1/00

Foreign References:

JPH05242788A	1993-09-21
JPH04370622A	1992-12-24
JPH09213191A	1997-08-15
JPH08509093A	1996-09-24
JPH10149757A	1998-06-02
JPH0917300A	1997-01-17
JPH08213803A	1996-08-20

Other References: