Title:
MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
Document Type and Number:
WIPO Patent Application WO2001001025
Kind Code:
A9
Abstract:
A method of fabricating an elastomeric structure, comprising : forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Inventors:
UNGER MARC A (US)
CHOU HOU-PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
CHOU HOU-PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
Application Number:
PCT/US2000/017740
Publication Date:
July 25, 2002
Filing Date:
June 27, 2000
Export Citation:
Assignee:
CALIFORNIA INST OF TECHN (US)
UNGER MARC A (US)
CHOU HOU-PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
UNGER MARC A (US)
CHOU HOU-PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
International Classes:
B01L3/00; B81B1/00; G03F7/20; B81B3/00; B81B7/00; B81C1/00; B81C99/00; C12Q1/68; F04B17/00; F04B35/04; F04B43/04; F15C5/00; F16K7/00; F16K17/02; F16K99/00; (IPC1-7): F04B43/04; F15C5/00
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