Title:
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICROMIRROR AND PREPARATION METHOD THEREFOR, AND DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/108365
Kind Code:
A1
Abstract:
A micro-electro-mechanical system (MEMS) micromirror and a preparation method therefor, and a detection device, which relate to the technical field of MEMSs and are used for solving the problem of the impact of temperatures on a measurement result of a MEMS micromirror. The MEMS micromirror comprises a mirror surface portion (1), an annular coil portion (2), one portion of a rotary shaft (3) that connects the coil portion (2) to the mirror surface portion (1), and another portion of the rotary shaft (3) that is located on the side of the coil portion (2) away from the mirror surface portion (1) and that is connected to the coil portion (2). The mirror surface portion (1) is surrounded by the coil portion (2). The rotary shaft (3) comprises a first silicon layer (301), a first dielectric layer (401) and a first semiconductor layer (501), which are stacked in sequence. The first semiconductor layer (501) comprises at least one resistor (311), the at least one resistor (311) including a piezoresistor.
Inventors:
LI ZHANXIN (CN)
LI MEI (CN)
LU LU (CN)
LI MEI (CN)
LU LU (CN)
Application Number:
PCT/CN2021/137542
Publication Date:
June 22, 2023
Filing Date:
December 13, 2021
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G02B26/08; B81B3/00; B81B7/02; B81C1/00; H01J3/14
Foreign References:
| US20050253055A1 | 2005-11-17 | |||
| US20200378848A1 | 2020-12-03 | |||
| CN104931163A | 2015-09-23 | |||
| CN104793331A | 2015-07-22 | |||
| US20010052834A1 | 2001-12-20 | |||
| JP2003207737A | 2003-07-25 | |||
| CN109160481A | 2019-01-08 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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