Title:
METHOD FOR REDUCING AGGLOMERATION OF SILVER ETCHING BY-PRODUCTS
Document Type and Number:
WIPO Patent Application WO/2022/267372
Kind Code:
A1
Abstract:
The present application relates to a method for reducing agglomeration of silver etching by-products, comprising the following steps: step 1, providing a plurality of groups of filter screen groups in a vacuum tube connecting a dry pump and an IBE chamber, an interval between adjacent filter screen groups being 50-500 mm, each group of filter screen group comprising 1-3 layers of filter screens, and an interval between adjacent filter screens being 0.5-5 mm; and step 2, filling with a chemical adsorbent between the filter screens. According to the present application, most of silver by-products can be filtered or adsorbed.
Inventors:
ZHENG ZHIYUAN (CN)
YANG YUXIN (CN)
LI JIAHE (CN)
PENG TAIYAN (CN)
XU KAIDONG (CN)
YANG YUXIN (CN)
LI JIAHE (CN)
PENG TAIYAN (CN)
XU KAIDONG (CN)
Application Number:
PCT/CN2021/136770
Publication Date:
December 29, 2022
Filing Date:
December 09, 2021
Export Citation:
Assignee:
JIANGSU LEUVEN INSTR CO LTD (CN)
International Classes:
B01D36/00; B01D53/04; H01J37/30; H01J37/305
Foreign References:
| CN210325685U | 2020-04-14 | |||
| CN101072620A | 2007-11-14 | |||
| CN112563134A | 2021-03-26 |
Other References:
WU, XIANGMEI ET AL.: "ADSORPTION OF SILVER ONTO THIOL-RESIN AND ITS MECHANISM", JOURNAL OF CHEMICAL INDUSTRY AND ENGINEERING, vol. 54, no. 10, 31 October 2003 (2003-10-31), pages 1466 - 1469, XP093016631, ISSN: 0438-1157
ZHANG, JING ET AL.: "Adsorption behavior of silver by thiol-functionalized composite microspheres", SCIENCE AND TECHNOLOGY OF FOOD INDUSTRY, vol. 37, no. 16, 30 April 2016 (2016-04-30), pages 151 - 156, XP093016635, ISSN: 1002-0306
ZHANG, JING ET AL.: "Adsorption behavior of silver by thiol-functionalized composite microspheres", SCIENCE AND TECHNOLOGY OF FOOD INDUSTRY, vol. 37, no. 16, 30 April 2016 (2016-04-30), pages 151 - 156, XP093016635, ISSN: 1002-0306
Attorney, Agent or Firm:
NANJING JINGWEI PATENT & TRADEMARK AGENCY CO., LTD (CN)
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