Title:
METHOD FOR PURIFYING ORGANIC SOLVENT, AND DEVICE FOR PURIFYING ORGANIC SOLVENT
Document Type and Number:
WIPO Patent Application WO/2018/043697
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: a method for purifying an organic solvent which is capable of inhibiting the occurrence of defects in semiconductor devices; and a device for purifying the organic solvent. This method for purifying the organic solvent includes an organic impurity removal step in which an organic impurity adsorption member is used to remove an organic impurity in the organic solvent.
Inventors:
KAMIMURA TETSUYA (JP)
Application Number:
PCT/JP2017/031557
Publication Date:
March 08, 2018
Filing Date:
September 01, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B01D15/00; B01D61/14; B01D61/58; B01J39/05; B01J39/20; G03F7/16; G03F7/32
Domestic Patent References:
| WO2006059760A1 | 2006-06-08 |
Foreign References:
| JP2008208048A | 2008-09-11 | |||
| JP2016073922A | 2016-05-12 | |||
| JP2015521101A | 2015-07-27 | |||
| JP2003251120A | 2003-09-09 | |||
| JP2013150979A | 2013-08-08 | |||
| JP2013218308A | 2013-10-24 | |||
| JP2010111002A | 2010-05-20 | |||
| JPH06106032A | 1994-04-19 |
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (JP)
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