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Title:
METHOD FOR PURIFYING NITROUS OXIDE
Document Type and Number:
WIPO Patent Application WO/2024/060353
Kind Code:
A1
Abstract:
A method for purifying nitrous oxide, comprising: introducing nitrous oxide raw material gas into an adsorber (210) filled with an impurity gas adsorbent, and causing the nitrous oxide raw material gas to be in contact with the impurity gas adsorbent to obtain electronic-grade nitrous oxide. The impurity gas adsorbent comprises a liquid adsorbent, and a solid adsorbent dispersed inside the liquid adsorbent; the liquid adsorbent comprises an ionic liquid and a polymer adsorbent dissolved in the ionic liquid; the polymer adsorbent comprises phenolic hydroxyl; the solid adsorbent comprises a porous structure capable of allowing the liquid adsorbent to enter and exit; and a deposition layer containing an elemental metal and a metal oxide is further deposited on the surface of the solid adsorbent. The impurity gas adsorbent can achieve a good adsorption effect on impurity gas in the nitrous oxide raw material gas by the technical means of physical adsorption and chemical adsorption combination.

Inventors:
ZHAO YI (CN)
SHI LIN (CN)
JIN LONG (CN)
QU SHENGWEI (CN)
LI QINGDONG (CN)
Application Number:
PCT/CN2022/127325
Publication Date:
March 28, 2024
Filing Date:
October 25, 2022
Export Citation:
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Assignee:
QUANJIAO CREDITCHEM ELECTRONIC MAT CO LTD (CN)
International Classes:
B01D53/79; B01D53/46; B01D53/78
Foreign References:
CN109745952A2019-05-14
CN107552006A2018-01-09
CN107651651A2018-02-02
CN113350970A2021-09-07
CN114272890A2022-04-05
CN114308064A2022-04-12
US20090266230A12009-10-29
Attorney, Agent or Firm:
ZHEJIANG KG IP LAW FIRM (CN)
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