IN SEMICONDUCTOR MANUFACTURING

Background

This invention relates generally to a method for producing an ion exchange resin useful in purifying water used in semiconductor manufacturing.

Recently the trend of Ultra-Pure Water (UPW) design is towards Reverse Osmosis (RO) plus Electrodeionization (EDI). With this design it is critical to reduce boron to very low levels. Boron selective ion exchange resins, e.g., amino polyol functionalized resins, are an attractive option for this. However the resins need to be exceptionally clean, i.e., having low total organic carbon (TOC) and to produce water with high resistivity. The resins also need to be physically stable and have high capacity to remove boron. For example, JP4518112 discloses a method for reducing TOC in amino polyol resins. However, this reference teaches a method using harsh conditions which may impact other resin properties.

Statement of Invention

The present invention is directed to a method for producing an ion exchange resin. The method comprises steps of:

(a) providing a basic ion exchange resin in the acidic form, said resin comprising amino polyol groups and having a volume % swell from 15 to 30% upon conversion from the basic form to the acidic form, and

(b) washing the resin with water or aqueous acid.

The present invention is further directed to an ion exchange resin comprising from 2 to 4 wt% polymerized units of a crosslinker, a macroreticular structure, from 2.0 to 3.2 equivalents/kg of active sites, said active sites comprising amino polyol functional groups.

Detailed Description

All percentages are weight percentages (wt%), and all temperatures are in °C, unless otherwise indicated. Averages are arithmetic averages unless indicated otherwise. All operations are performed at room temperature (18 to 25 °C) unless specified otherwise.

The polymerization, chloromethylation, and amination steps are designed to give a final product that has a swell on conversion from free base to acid form of 15-30%. This swell is determined by crosslinking and by the number and type of functional groups. There are three types of crosslinking: (i) crosslinking from copolymerization of crosslinkers with styrenic monomers, (ii) methylene bridging occurring in the chloromethylation, and (iii) reaction of the amino polyol with two chloromethyl groups in the amination (strong base groups). The degree of chloromethylation and amination impact the relative numbers of different functional groups.

“Styrenic monomers” include monoethylenically unsaturated aromatic compounds, e.g., styrene, vinyltoluene, ethylvinylbenzene, chlorostyrene, and vinylnaphthalene. “Styrenic crosslinkers” include multiethylenically unsaturated aromatic compounds such as divinylbenzene and trivinylbenzene. Other monoethylenically unsaturated compounds can be added, preferably in amounts less than 10 wt% (preferably less than 5 wt%) for product improvements such as strength, preferably, e.g., methacrylic acids and their esters, vinylpyridines, acrylonitrile, vinyl ethers, esters, and ketones. Multiethylenically unsaturated compounds can also be used as crosslinkers, preferably, e.g., trivinylcyclohexane, and di and tri methacrylate compounds such as trimethylol propane trimethacrylate. Percentages of monomer units in a polymer are based on total polymer weight (dry weight). The term“gel” resin applies to a resin which was synthesized from a very low porosity (0 to 0.1 cm ³ /g), small average pore size (0 to 17 A) and low B.E.T. surface area (0 to 10 m ² /g) copolymer. The term“macroreticular” (or MR) resin is applied to a resin which is synthesized from a high mesoporous copolymer with higher surface area than the gel resins. The total porosity of the MR resins is between 0.1 and 0.7 cm ³ /g, average pore size between 17 and 500 A and B.E.T. surface area between 10 and 200 m ² /g. MR resins typically are made by incorporating an organic solvent (“porogen”) into the monomer mixture. The term adsorbent resin is applied to a resin which can be functionalized or not, and which has very high surface area and porosity. These adsorbents have surface area between 200 and 1300 m ² /g, average pore size between 17 and 1000 A and total porosity between 0.7 and 200 cm ³ /g. The“harmonic mean diameter” (HMD) is defined by the following equation:

HMD =

where i is an index over the individual beads; di is the diameter of each individual particle; and N is the total number of beads. Resin beads are substantially spherical.

The method of this invention preferably employs a basic ion exchange resin comprising from 2 to 4 wt% polymerized units of a crosslinker; a macroreticular structure; and from 2.0-3.2 equivalents/kg of active sites, said active sites comprising amino polyol functional groups.

Active sites are amino groups and quaternary ammonium groups.

Preferably, the crosslinker has two polymerizable carbon-carbon double bonds per molecule. Preferably, the crosslinker has a molecular weight from 100 to 400, preferably 100 to 250, preferably 120 to 200. Preferably, the resin comprises from 2.5 to 3.5 wt% polymerized units of crosslinker. Preferably, the resin comprises from 96 to 98 wt% styrenic monomers, preferably 96.5 to 97.5 wt%. Preferably, the crosslinker is divinylbenzene. Preferably, the resin comprises from 96 to 98 wt% polymerized units of styrene and from 2 to 4 wt% polymerized units of divinylbenzene; preferably from 96.5 to 97.5 wt% polymerized units of styrene and from 2.5 to 3.5 wt% polymerized units of divinylbenzene.

Preferably, the copolymer is chloromethylated, preferably under conditions that give 90- 100% substitution of the styrenic monomer. Chloromethylation is performed under conditions to minimize methylene bridging that could lower the swell. The crosslinked chloromethylated styrenic polymer is then aminated with an amino polyol, preferably N-methylglucamine.

Preferably, after amination, the resin comprises from 2.0-3.2 equivalents/kg of active sites, preferably at least 2.3 equivalents/kg of active sites, preferably at least 2.5 equivalents/kg of active sites; preferably no more than 3.1 equivalents/kg of active sites, preferably no more than 3.0 equivalents/kg of active sites; preferably 2.5-3.0 equivalents/kg of aminopolyol groups.

Preferably, the amino polyol group comprises from 3 to 9 carbon atoms, preferably at least 4, preferably at least 5, preferably at least 6; preferably no more than 8, preferably no more than 7. Preferably, the amino polyol group comprises from 2 to 8 hydroxyl groups, preferably at least 3, preferably at least 4, preferably at least 5; preferably no more than 7, preferably no more than 6. Preferably, the amino polyol group has 7 carbon atoms and 5 hydroxyl groups. N- methylglucamine is especially preferred. The amino polyol group in the resin is produced by allowing a chloromethylated crosslinked polymer comprising polymerized units of styrenic monomers to react with an amino polyol. The amino polyol is bonded to one or two benzene rings by a nitrogen-carbon bond between the amino nitrogen and a methylene group attached to the benzene ring, as illustrated below for N-methylglucamine and a crosslinked polystyrene.

SttangSsme

SHes

When the amino polyol N-methylglucamine is bound to two benzene rings nitrogen is part of a quaternary amine (strong base) group. This crosslinks the polymer and decreases the swell. Preferably, the resin after the amination process has from zero to 30% strong base, preferably 5-20% strong base, preferably 5-10% strong base, based on total basic sites.

The basic ion exchange resin in the acidic form is produced by adding aqueous acid to the resin in the basic form and allowing the resin to soak. Preferably, the acid soak is repeated at least once. Conditions for acid treatment of ion exchange resins are well known. The water or aqueous acid wash following acid treatment is performed according to known processes.

Preferably, the resin is washed with at least 20 BV of DI water, preferably at least 40 BV of DI Water, preferably at least 60 BV of DI Water. Preferably, the temperature of the DI water is from 50°C to 100°C, preferably 50°C to 85°C (loss of strong base is possible above 85°C), preferably 75°C-85°C. Preferably, water is used as a wash. If aqueous acid is used the acid concentration preferably is less than 10 wt%, preferably less than 5 wt%, preferably less than 1 wt%. Preferably, the resin is converted back to the basic form for use by contacting it with aqueous base under well-known conditions.

Preferably, the ion exchange resin particles have a harmonic mean diameter from 100- 1500 pm, preferably at least 300 pm, preferably at least 400 pm; preferably no greater than 1000 pm, preferably no greater than 700 pm preferably no greater than 600 pm.

Examples

Abbreviations used: DI=deionized; BV=bed volumes; TOC=total organic carbon;

MHC=moisture holding capacity; WC=weight capacity (equivalents active sites/kg), VC is volume capacity on a per liter basis; SB=strong base (equivalents of strong base/total equivalents (strong and weak base)).

Examples:

Best practice - Example 1 (80C wash after acid treatment)

1. To a 5 gallon vessel add 7 liters of Dowex™BSR-l Chelating Resin. The resin was

measured to have a swell (OH to Cl) of 22%

2. Add 7 liters of 4 wt% HC1.

3. Allow to soak for 30 minutes, remove liquid with siphon

4. Repeat steps 2 and 3 twice (total of 21 liters of HC1)

5. Add 7 liters of DI Water

6. Allow to soak for 20 minutes, remove liquid with siphon

7. Repeat steps 2 and 3 twice (total of 21 liters of DI Water)

8. Repeat steps 1-7 to make a total of 14 liters of HC1 treated BSR-1 Resin

9. To a 20 liter glass column (5.5 in diameter) charge 14 liters of HC1 treated BSR-1 Resin

10. Pass 80°C DI Water downflow through the column at 6.6 BV/hr (1540 ml/min) for 13 hr

11. Pass ambient DI Water downflow through the column at 6.6 BV/hr (1540 ml/min) for 13 hr

12. Pass 21 liters of 4% NaOH through the column at 350 ml/min for 60 min.

13. Stop flow and allow resin to soak in the 4% NaOH for 30 minutes

14. Repeat steps 12 and 13

15. Pass ambient DI Water downflow through the column at 6.6 BV/hr (1540 ml/min) for 6.5 hr

16. Packout and dewater with siphon The final resin was analyzed for baseline delta-TOC and resistivity using an Anatel A- 1000 at 50 BV/hr. The baseline delta-TOC rinsed down to 2.0-2.1 ppb and the resistivity rinsed up to 18.1 MOhm-cm. The static boron capacity was measured to be 3.8 g-boron/kg resin before the above wash. After washing the static boron capacity was measured to be 3.5 g-boron/kg resin (92 % of original capacity)

The routine properties were not impacted by the wash process.

Product

BSR-1 Spec

Plant BSR-1

(Example 1_

Initial)

Pilot plant

BSR-1

(Ex. 1

conditions)

Comparative - Example 2 (PWA10 with cross treatment)

1. To a beaker add 500 ml of Amberlite™ PWA10. The resin was measured to have a swell (OH to HC1) of 7%

2. Add 500 ml of MilliQ water and soak overnight

3. Remove the liquid with a siphon

4. Add 500 ml of IN HC1. Contact for 30 seconds.

5. Remove the liquid with a siphon

6. Repeat steps 3-4

7. Transfer the resin to a glass column

8. Pass IN HC1 through the resin at 4 B V/hr (33 ml/min) for 1.4 hr at ambient temperature

9. Pass MilliQ water though the resin at 4 BV/hr (33 ml/min) for 1.0 hr at ambient

temperature

10. Pass IN NaOH through the resin at 4 BV/hr (33 ml/min) for 1.3 hr at ambient

temperature 11. Pass MilliQ water though the resin at 4 BV/hr (33 ml/min) for 1.0 hr at ambient temperature

12. Repeat steps 10-11

The final resin was analyzed for baseline delta-TOC and resistivity using an Anatel A- 1000 at 25 BV/hr. The baseline delta-TOC rinsed down to 34.5 ppb and the resistivity rinsed up to 18.2 MOhm-cm.

Comparative - Example 3 (BSR-1 with cross treatment)

1. To a beaker add 500 ml of Dowex™BSR-l Chelating Resin. The resin was measured to have a swell (OH to Cl) of 22%

2. Add 500 ml of MilliQ water and soak overnight

3. Remove the liquid with a siphon

4. Add 500 ml of IN HC1. Contact for 30 seconds.

5. Remove the liquid with a siphon

6. Repeat steps 3-4

7. Transfer the resin to a glass column

8. Pass IN HC1 through the resin at 4 BV/hr (33 ml/min) for 1.4 hr at ambient temperature

9. Pass MilliQ water though the resin at 4 BV/hr (33 ml/min) for 1.0 hr at ambient

temperature

10. Pass IN NaOH through the resin at 4 BV/hr (33 ml/min) for 1.3 hr at ambient

temperature

11. Pass MilliQ water though the resin at 4 BV/hr (33 ml/min) for 1.0 hr at ambient

temperature

12. Repeat steps 10-11

The final resin was analyzed for baseline delta-TOC and resistivity using an Anatel A- 1000 at 25 BV/hr. The baseline delta-TOC rinsed down to 9.8 ppb and the baseline resistivity rinsed up to 18.2 MOhm-cm.

Comparative - Example 4 (PWA10 washed at 90C) - PAC-BSR-11

1. To a 2 inch diameter jacketed glass column charge 150 ml of Amberlite™ PWA10. 2. Pass 90C DI water downflow through the column at 6.6 BV/hr (16 ml/min) for 6.5 hr

3. Pass ambient DI water downflow through the column at 13 BV/hr (33 ml/min) for 1.9 hr

4. Packout and dewater with siphon

The final resin was analyzed for baseline delta-TOC and resistivity using an Anatel A- 1000 at 50 BV/hr. The baseline delta-TOC rinsed down to 2.5 ppb and the baseline resistivity rinsed up to 17.7 MOhm-cm. The static boron capacity was measured to be 4.2 g-boron/L- resin before the above wash. After washing the static boron capacity was measured to be 3.2 g-boron/L-resin (77% of original capacity).

This wash process changed the % strong base from 34.5% to 13.9%.