Title:
METHOD FOR MONITORING GAS CONCENTRATION AND AIR PRESSURE DATA OF SEMICONDUCTOR 12-INCH N2STK
Document Type and Number:
WIPO Patent Application WO/2024/082598
Kind Code:
A1
Abstract:
Disclosed in the present invention is a method for monitoring gas concentration and air pressure data of a semiconductor 12-inch N2STK. An MCS system performs overall monitoring according to a nitrogen charging time required by a wafer product, and when a wafer S is stored for more than a set time, nitrogen is automatically supplemented. The method comprises the specific steps of: placing a FOUP wafer in N2STK, and an MCS inquiring of an MES about a nitrogen charging time and the longest nitrogen supplementing interval time of the wafer; the MES replying with the nitrogen charging time, and starting nitrogen charging after the wafer is warehoused; the MCS starting nitrogen charging time counting, during which, if there is a wafer ex-warehouse or warehouse-transfer requirement, the MCS refuses to execute same, and forbids ex-warehouse or warehouse transfer; if the wafer is stored in the N2STK for a long time, the MCS issuing a nitrogen charging instruction again, so as to perform a nitrogen charging operation on the wafer; and after nitrogen charging is completed, an ex-warehouse operation being capable of being performed on the wafer, so as to proceed to the next process. By means of the present invention, only three systems are spanned during the whole process, such that the number of systems, with which flow processing interfaces, is reduced, thereby improving the efficiency of flow processing.
Inventors:
GAO CHAO (CN)
Application Number:
PCT/CN2023/091118
Publication Date:
April 25, 2024
Filing Date:
April 27, 2023
Export Citation:
Assignee:
SHANGHAI GLORYSOFT CO LTD (CN)
International Classes:
H01L21/67; H01L21/673; H01L21/677
Foreign References:
| CN115547891A | 2022-12-30 | |||
| TWM323684U | 2007-12-11 | |||
| CN113078084A | 2021-07-06 | |||
| US20050228530A1 | 2005-10-13 | |||
| CN101752282A | 2010-06-23 | |||
| CN114850162A | 2022-08-05 |
Attorney, Agent or Firm:
SHANGHAI CPTO INTELLECTUAL PROPERTY AGENCY CO., LTD (CN)
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