METHOD FOR MANUFACTURING PIPE DEPOWDERING DEVICE AND METHOD FOR INSTALLING SAME

WIPO Patent Application WO/2024/029677

A1

The present invention relates to a method for manufacturing a pipe depowdering device and a method for installing same and, more specifically, to a method for manufacturing a pipe depowdering device and a method for installing same, wherein deposition/attachment of discharged materials to the inner peripheral surface of a pipe is suppressed, the pipe being exposed to a flow of discharged materials, such as unreacted raw material gases and reaction products, discharged from semiconductor and display substrate processing devices and the like. The present invention comprises: a heater manufacturing step (S1) comprising a step (S11) of manufacturing an intermediate product by installing a heating wire connected to a power supply inside a metal tube and filling same with an insulating agent, and a step (S12) of cutting the intermediate product and connecting one end of exposed heating wires; a winding step (S2) of winding the heater around a jig so as to manufacture a heating coil having a predetermined outer diameter and having at least a part inserted into the pipe; and a coupling step (S3) of inserting an end of the heating coil into an exposure hole formed in a metal flange, thereby coupling the flange and the heating coil.

KIM GI-NAM (KR)

PCT/KR2023/000786

February 08, 2024

January 17, 2023

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M I CO LTD (KR)

H01L21/67; C23C16/44; F16L53/38; H05B3/04; H05B3/06; H05B3/52

JP2018041945A	2018-03-15
KR200219527Y1	2001-04-02
KR20040014856A	2004-02-18
KR20130077286A	2013-07-09
KR20000046754A	2000-07-25
KR102486703B1	2023-01-10
KR20070030615A	2007-03-16
KR200366263Y1	2004-11-04

KIM, Min-Kyu (KR)

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