Title:
METHOD AND DEVICE FOR MEASURING CONCENTRATION OF TRACE GAS COMPONENT IN WATER
Document Type and Number:
WIPO Patent Application WO/2023/063300
Kind Code:
A1
Abstract:
Provided are a method and a device for measuring the concentration of a trace gas component in water, which avoids complexity for a person, and which is suitable for high-precision measurement of a trace gas component present in water such as ultrapure water, by implementing measures to increase the sensitivity of a sample water collecting method and a concentrating operation, and to prevent a decrease in column separation performance resulting from a large volume of sample water. The device is characterized by comprising: an introducing means for introducing a predetermined amount of water to be measured into a flow passage of a measuring means; a gas-water separating means for employing a pre-column to separate the water to be measured, that has been introduced into the flow passage of the measuring means, into the trace gas component and water; a concentrating means for cooling and concentrating the trace gas component separated from the water, heating the concentrated trace gas component, and delivering the same to a main column part; an oxygen removing means for removing oxygen from the delivered trace gas component; a gas component separating means for separating the trace gas component, from which the oxygen has been removed, into one or a plurality of types of gas component, excluding the oxygen component, by means of the main column part; and a detecting means for detecting the separated one or plurality of types of gas component.
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Inventors:
ONO YOSHINORI (JP)
KITANO NOBUKO (JP)
UCHIGAKI MAYUMI (JP)
NAGASAWA SHOZO (JP)
KITANO NOBUKO (JP)
UCHIGAKI MAYUMI (JP)
NAGASAWA SHOZO (JP)
Application Number:
PCT/JP2022/037837
Publication Date:
April 20, 2023
Filing Date:
October 11, 2022
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
G01N1/22; G01N30/08; G01N30/14; G01N30/40; G01N30/88; G01N33/18
Foreign References:
| JP2017207322A | 2017-11-24 | |||
| JP2008175601A | 2008-07-31 | |||
| JP2017181264A | 2017-10-05 | |||
| JP2019174181A | 2019-10-10 | |||
| JPH0712788A | 1995-01-17 | |||
| JP2011064527A | 2011-03-31 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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