Title:
METHOD FOR CONTROLLING LIFTER PIN AND CONVEYANCE ARM
Document Type and Number:
WIPO Patent Application WO/2024/070818
Kind Code:
A1
Abstract:
Provided is a method which is for controlling a lifter pin and is for performing substrate delivery between a conveyance arm on which a multistage effector is mounted and a stage inside a processing module of a substrate processing device, wherein the multistage effector: has a plurality of sensors for determining the height of the lifter pin; uses the plurality of sensors to determine the height position of the lifter pin; and adjusts the height of the lifter pin on the basis of the determination result.
Inventors:
NISHIMORI YUICHI (JP)
KAWAMURA TOSHIKI (JP)
MIYAMATSU JUNYA (JP)
KAWAMURA TOSHIKI (JP)
MIYAMATSU JUNYA (JP)
Application Number:
PCT/JP2023/033944
Publication Date:
April 04, 2024
Filing Date:
September 19, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/683; H01L21/677
Foreign References:
| JP2017139261A | 2017-08-10 | |||
| JP2013153187A | 2013-08-08 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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