Title:
METHOD AND APPARATUS FOR SUPPLYING WATER OF SPECIFIED CONCENTRATION
Document Type and Number:
WIPO Patent Application WO/2018/179503
Kind Code:
A1
Abstract:
Provided is a method for supplying water of specified concentration, the method comprising a step for adding, to ultrapure water, at least two kinds of liquids, that is, a first liquid which is a conductive liquid and a second liquid which is a nonconductive liquid, to produce water of specified concentration containing a first liquid component and a second liquid component of specified concentrations, wherein a mixed liquid in which the first liquid and the second liquid have been mixed in advance at a specified mixing ratio is prepared, and the mixed liquid is added to the ultrapure water such that the electric conductivity or resistivity of the ultrapure water after the addition has a specified value. An apparatus for implementing the method is also provided.
Inventors:
IINO HIDEAKI (JP)
Application Number:
PCT/JP2017/033550
Publication Date:
October 04, 2018
Filing Date:
September 15, 2017
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
B01F3/08; B01F15/04; B01J4/02; H01L21/304
Foreign References:
| JP2008211096A | 2008-09-11 | |||
| JP2014236079A | 2014-12-15 | |||
| JP2000208471A | 2000-07-28 | |||
| JP2004275917A | 2004-10-07 | |||
| JP2003334433A | 2003-11-25 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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