Title:
METHOD FOR ANALYZING GAS CONTAINING NITROSYL FLUORIDE, AND METHOD FOR REMOVING NITROSYL FLUORIDE IN GAS
Document Type and Number:
WIPO Patent Application WO/2023/105975
Kind Code:
A1
Abstract:
Provided is a method for analyzing a gas containing nitrosyl fluoride, whereby it becomes possible to quantify an oxygen gas and a nitrogen gas contained in a mixed gas comprising nitrosyl fluoride and at least one of the oxygen gas and the nitrogen gas safely with high accuracy. The method for analyzing a gas containing nitrosyl fluoride includes: a conversion step for bringing the mixed gas into contact with a reacting agent capable of reacting with nitrosyl fluoride to produce a nitrogen oxide, thereby converting the nitrosyl fluoride to a nitrogen oxide by the reaction of the nitrosyl fluoride with the reacting agent; a removal step for bringing a gas obtained after the conversion step into contact with an adsorbent capable of adsorbing the nitrogen oxide to remove the nitrogen oxide from the gas by the adsorption of the nitrogen oxide; and an analysis step for analyzing the gas obtained after the removal step to quantify the oxygen gas and the nitrogen gas.
Inventors:
IWASAKI JUMPEI (JP)
KANAUCHI RIKU (JP)
KANAUCHI RIKU (JP)
Application Number:
PCT/JP2022/040249
Publication Date:
June 15, 2023
Filing Date:
October 27, 2022
Export Citation:
Assignee:
RESONAC CORP (JP)
International Classes:
G01N30/14; B01J20/02; B01J20/20; G01N21/35; G01N30/00; G01N30/88
Domestic Patent References:
| WO2019176624A1 | 2019-09-19 |
Foreign References:
| JP2003014716A | 2003-01-15 | |||
| JP3339962B2 | 2002-10-28 | |||
| JPH0797106B2 | 1995-10-18 |
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (JP)
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