Title:
METHOD FOR ADJUSTING MEASUREMENT LIGHT PATH OF SCRIBE LINE POSITION OF GRATING RULING ENGINE, AND SYSTEM FOR SAME
Document Type and Number:
WIPO Patent Application WO/2020/108417
Kind Code:
A1
Abstract:
A method for adjusting a measurement light path of a scribe line position of a grating ruling engine, and a system for the same, pertaining to the technical field of diffraction grating manufacturing. The method comprises: installing a crosshair target element (10) on a work platform (8) of the grating ruling engine; installing a laser (1), the laser (1) emitting a beam on the crosshair target element (10), and adjusting an orientation of the laser (1); installing a measurement mirror (7), and adjusting an orientation of the measurement mirror (7); installing a beam splitter (2) between the laser (1) and the measurement mirror (7), a light beam emitted by the laser (1) being transmitted through the beam splitter (2) and irradiating the measurement mirror (7), and adjusting an orientation of the beam splitter (2); installing a deflection mirror (3) at a position parallel to the beam splitter (2), a light beam emitted by the laser (1) irradiating the measurement mirror (7) via the deflection mirror (3), and adjusting an orientation of the deflection mirror (3); and installing a laser interferometer A (4) between the beam splitter (2) and the measurement mirror (7), installing a laser interferometer B (5) between the deflection mirror (3) and the measurement mirror (7), and adjusting orientations of the laser interferometer A (4) and the laser interferometer B (5).
Inventors:
TANG YUGUO (CN)
MI XIAOTAO (CN)
QI XIANGDONG (CN)
YU HAILI (CN)
BAYIN HEXIGE (CN)
ZHANG SHANWEN (CN)
YU HONGZHU (CN)
MI XIAOTAO (CN)
QI XIANGDONG (CN)
YU HAILI (CN)
BAYIN HEXIGE (CN)
ZHANG SHANWEN (CN)
YU HONGZHU (CN)
Application Number:
PCT/CN2019/120450
Publication Date:
June 04, 2020
Filing Date:
November 23, 2019
Export Citation:
Assignee:
CHANGCHUN INSTITUTE OF OPTICS FINE MECH AND PHYSICS CHINESE ACADEMY OF SC (CN)
International Classes:
G02B5/18; G03F9/00
Foreign References:
| CN109407192A | 2019-03-01 | |||
| CN102540783A | 2012-07-04 | |||
| CN104678889A | 2015-06-03 | |||
| EP0683404A1 | 1995-11-22 | |||
| EP2466346A1 | 2012-06-20 |
Other References:
MI, XIAOTAO: "Controller Design of Microposition System in the Large Diffraction Grating Ruling Engine and Research on Correction Diffraction Wavefront", CHINESE DOCTORAL DISSERTATIONS FULL-TEXT DATABASE, ENGINEERING SCIENCE & TECHNOLOGY II, no. year 2018, 10, 15 October 2018 (2018-10-15), DOI: 20200213165444X
Attorney, Agent or Firm:
SHENZHEN KEJIN INTELLECTUAL PROPERTY OFFICE (CN)
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