Title:
METAL MASK
Document Type and Number:
WIPO Patent Application WO/2024/071048
Kind Code:
A1
Abstract:
A metal mask (10) comprising a mask plate (20) and a coating member (30) that coats regions of the mask plate (20). The mask plate (20) has: one or more openings (22) for forming a membrane; and multiple marks (23) for detecting deformation of the mask plate (20). The regions comprise multiple regions (25) corresponding to the multiple marks (23). Each of the multiple regions (25) is a region containing a mark (23) corresponding to the region (25) from among the multiple marks (23).
Inventors:
SUGIMOTO AKIRA
YAKURA MASAKI
MORI TSUTOMU
NAKAJIMA MINORU
KAMIYA AKINORI
YAKURA MASAKI
MORI TSUTOMU
NAKAJIMA MINORU
KAMIYA AKINORI
Application Number:
PCT/JP2023/034763
Publication Date:
April 04, 2024
Filing Date:
September 25, 2023
Export Citation:
Assignee:
JDI DESIGN AND DEV G K (JP)
International Classes:
C23C14/04
Domestic Patent References:
| WO2013161450A1 | 2013-10-31 |
Foreign References:
| JP2018138701A | 2018-09-06 | |||
| JP2021080567A | 2021-05-27 |
Attorney, Agent or Firm:
YOSHIKAWA, Shuichi et al. (JP)
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