Title:
MEMS OPTICAL MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2024/066065
Kind Code:
A1
Abstract:
Disclosed in the present application is an MEMS optical microphone. The MEMS optical microphone comprises: a shell, which has an inner cavity and a sound inlet, which allows the inner cavity to be in communication with the outside; a micro-electro-mechanical module, which comprises a vibrating diaphragm, the vibrating diaphragm being suspended in the inner cavity, wherein when a pressure is applied to the vibrating diaphragm, a light-passing gap is opened in the vibrating diaphragm, and the size of the light-passing gap is increased or reduced with the pressure applied to the vibrating diaphragm; a photoelectric module, which comprises an electromagnetic radiation source and a sensor, wherein a light beam, which is emitted by the electromagnetic radiation source, passes through the light-passing gap and then reaches the sensor; and an integrated circuit module, which is electrically connected to the photoelectric module. In the present application, a vibrating diaphragm is provided with a light-passing gap, which is opened or closed in response to a pressure or sound signal applied to the vibrating diaphragm, and the amount of light, which is transmitted through the light-passing gap, is controlled such that a transmitted light beam is converted into an electrical signal, which corresponds to an applied pressure level for the sound signal and has the advantages of a high sensitivity, a flat frequency response, etc., thereby providing potential for further improving the device performance.
Inventors:
ALI TAIMOOR (GB)
Application Number:
PCT/CN2022/138554
Publication Date:
April 04, 2024
Filing Date:
December 13, 2022
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R23/00
Domestic Patent References:
| WO2022009659A1 | 2022-01-13 |
Foreign References:
| CN101825645A | 2010-09-08 | |||
| CN201090270Y | 2008-07-23 | |||
| JPS63260397A | 1988-10-27 | |||
| US20020080241A1 | 2002-06-27 | |||
| CN112470493A | 2021-03-09 |
Attorney, Agent or Firm:
UNI-INTEL PATENT AND TRADEMARK LAW FIRM (CN)
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