MEMS MICROPHONE - CSMC TECHNOLOGIES FAB1 CO LTD

Title:

MEMS MICROPHONE

Document Type and Number:

WIPO Patent Application WO/2016/180262

Kind Code:

A1

Abstract:

An MEMS microphone comprises a substrate (100), a support portion (200), a superimposed layer (600), an upper plate (300) and a lower plate (400). The substrate (100) is provided with an opening (120) penetrating the middle thereof; the lower plate (400) is arranged above and spanning the substrate (100); the support portion (200) is fixed on the lower plate (400); the upper plate (300) is attached on the support portion (200); an accommodation cavity (500) is formed from the support portion (200), the upper plate (300) and the lower plate (400); the superimposed layer (600) is attached on an intermediate region of the upper plate (300) or the lower plate (400), and insulation is achieved between the upper plate (300) and a lower plate (400).

Inventors:

HU YONGGANG (CN)

Application Number:

PCT/CN2016/081062

Publication Date:

November 17, 2016

Filing Date:

May 05, 2016

Export Citation:

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Assignee:

CSMC TECHNOLOGIES FAB1 CO LTD (CN)

International Classes:

H04R19/04

Foreign References:

CN101189910A	2008-05-28
CN104105040A	2014-10-15
CN103731783A	2014-04-16
CN102415108A	2012-04-11
US5146435A	1992-09-08

Other References: