MEMS MICRO-MIRROR AND DRIVING METHOD AND APPARATUS BASED THEREON, AND STORAGE MEDIUM

WIPO Patent Application WO/2023/116913

A1

A driving method and apparatus based on a two-dimensional MEMS micro-mirror, and a two-dimensional MEMS micro-mirror and a computer-readable storage medium. The method comprises: acquiring preset parameters of a two-dimensional MEMS micro-mirror (S11); respectively generating a driving function and a superposition function according to the preset parameters (S12); generating a slow axis driving signal according to the driving function and the superposition function (S13); and driving the rotation of a slow axis of the two-dimensional MEMS micro-mirror according to the slow axis driving signal (S14). Feedback signal receiving and processing circuit parts of a two-dimensional MEMS micro-mirror in the prior art can be omitted in the form of a circuit, and there is no need to acquire a feedback signal for adjustment, such that an adjustment mode has no lag in principle; and better robustness can be realized merely by adjusting a driving function according to a suitable superposition function to generate a driving signal, and the form of realization is simpler and preset parameters do not need to be calibrated.

HAN SHAOCHUN (CN)
QU ZHIWEI (CN)
WANG WEIXING (CN)
LI YUANYUAN (CN)

PCT/CN2022/141598

June 29, 2023

December 23, 2022

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WUHAN VANJEE OPTOELECTRONIC TECH CO LTD (CN)

G09G3/34; G02B26/08

CN102159982A	2011-08-17
CN102216829A	2011-10-12
CN111352089A	2020-06-30
CN108594869A	2018-09-28
US20120307211A1	2012-12-06
US20190011695A1	2019-01-10

SHENZHEN ZHONGYI UNION INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)

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