MEASUREMENT DEVICE AND MASS SPECTROMETER

WIPO Patent Application WO/2024/004311

A1

Provided are a measurement device and a mass spectrometer that allow estimating the range of an abnormal portion that is a source of noise superimposed on a detection signal.　In order to achieve the above purpose, a measurement device that includes a measurement unit that measures a measurement target and outputs a measurement signal, a detector that detects the measurement signal and outputs a detection signal, an analysis processing unit that calculates and outputs analysis results from the detection signal, an analysis result indicator that indicates the analysis results, and a device control module that controls the measurement unit and outputs a control signal, comprises an anomaly detection module that detects noise in the measurement device, wherein the anomaly detection module stores drive intervals of each component of the measurement device in a memory resource, and for each component of the measurement device, determines whether noise is mixed in or not on the basis of the corresponding driving intervals stored in the memory resource and the analysis results of the analysis processing unit.

NISHIMOTO TAKUMA (JP)
FURUYA ISAO (JP)
HASHIMOTO YUICHIRO (JP)
SUGIYAMA MASUYUKI (JP)

PCT/JP2023/014169

January 04, 2024

April 06, 2023

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HITACHI HIGH TECH CORP (JP)

H01J49/00; H01J49/26

JP2016109770A	2016-06-20
JP2019114528A	2019-07-11
JP2016139505A	2016-08-04

SHIMPEI YOSHINO: "Intensity Estimation of Electromagnetic Radiation Originated from Individual Source Devices Based on Noise Source Amplitude Modulation and Correlation Analysis", THE 32ND JIEP ANNUAL MEETING, 6 March 2018 (2018-03-06), pages 316 - 319, XP093122113

SEIRYO I.P.C. (JP)

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