Title:
MASK TRANSFER SYSTEM AND TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2019/037672
Kind Code:
A1
Abstract:
A mask transfer system and transfer method, comprising an inner mask store (1) used for storing masks, a rotating mechanical arm used for moving the masks, and a mask fork (3) connected to the rotating mechanical arm and used for picking up the masks. The rotating mechanical arm is provided with a micro-adjustment piece (4) used for coordinating with the rotating mechanical arm to compensate position deviations of the masks picked up by the mask fork, so as to implement mask pre-alignment. The mask transfer system and transfer method achieve the effect of being low in cost.
Inventors:
WANG GANG (CN)
HUANG DONGLIANG (CN)
ZHANG RONGJUN (CN)
HUANG DONGLIANG (CN)
ZHANG RONGJUN (CN)
Application Number:
PCT/CN2018/101173
Publication Date:
February 28, 2019
Filing Date:
August 17, 2018
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
G03F9/00; G03F7/20
Foreign References:
| CN1534385A | 2004-10-06 | |||
| CN103972135A | 2014-08-06 | |||
| US20030077162A1 | 2003-04-24 | |||
| JP2006351863A | 2006-12-28 |
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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