Title:
MAINTENANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/228892
Kind Code:
A1
Abstract:
This maintenance device, for assisting the replacement of a conveyance robot attached to a conveyance module, comprises a cart, a housing, a first raising/lowering unit, a lower shutter, a support unit, and a second raising/lowering unit. The housing has an upper opening and a lower opening, and is disposed above the cart. The first raising/lowering unit is attached to the cart and is configured to raise/lower the housing between a first upper position and a first lower position. The housing is connected to the conveyance module when being at the first upper position. The lower shutter is configured to open/close the lower opening. The support unit is configured to support the conveyance robot. The second raising/lowering unit is configured to raise/lower the support unit between a second upper position inside the housing and a second lower position below the housing when the housing is at the first upper position.
Inventors:
AMIKURA NORIHIKO (JP)
Application Number:
PCT/JP2023/018867
Publication Date:
November 30, 2023
Filing Date:
May 22, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/677
Foreign References:
| JP2021176173A | 2021-11-04 | |||
| JP2021136359A | 2021-09-13 | |||
| JP2016018954A | 2016-02-01 | |||
| JP2015076590A | 2015-04-20 | |||
| JP2021093394A | 2021-06-17 | |||
| JP2013254796A | 2013-12-19 | |||
| JP2006196716A | 2006-07-27 | |||
| JP2001345366A | 2001-12-14 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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