Title:
MAGNETIC FLUID SHAFT
Document Type and Number:
WIPO Patent Application WO/2023/202117
Kind Code:
A1
Abstract:
A magnetic fluid shaft, comprising an inner shaft and an outer shaft. The outer shaft sleeve is mounted on the inner shaft, and a plurality of bearings arranged at intervals in the axial direction are provided between the outer shaft and the inner shaft; a magnetic fluid is filled between at least two adjacent bearings; at least one of the outer shaft and the inner shaft is provided with a cooling channel for introducing a cooling medium. By adoption of this solution, when cooling is required, a cooling medium may be introduced into the cooling channel to reduce the temperature of the magnetic fluid shaft, so that service performance and service life of the magnetic fluid shaft in a high-temperature environment are ensured, the magnetic fluid shaft can be used in two different processes of ion beam etching and ion beam deposition, and the applicability of the magnetic fluid shaft can be greatly improved.
Inventors:
SANG KANG (CN)
HU DONGDONG (CN)
CHEN LONGBAO (CN)
LIU PENGFEI (CN)
WANG CHENGYI (CN)
CHENG SHIRAN (CN)
GUO SONG (CN)
XU KAIDONG (CN)
HU DONGDONG (CN)
CHEN LONGBAO (CN)
LIU PENGFEI (CN)
WANG CHENGYI (CN)
CHENG SHIRAN (CN)
GUO SONG (CN)
XU KAIDONG (CN)
Application Number:
PCT/CN2022/139931
Publication Date:
October 26, 2023
Filing Date:
December 19, 2022
Export Citation:
Assignee:
JIANGSU LEUVEN INSTR CO LTD (CN)
International Classes:
H01L21/67; F16J15/16; H01L21/687
Domestic Patent References:
| WO2021239055A1 | 2021-12-02 |
Foreign References:
| JP2003093867A | 2003-04-02 | |||
| CN112867884A | 2021-05-28 | |||
| CN107408529A | 2017-11-28 | |||
| CN111448646A | 2020-07-24 | |||
| US10971327B1 | 2021-04-06 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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