Title:
MACHINING CONTROL METHOD FOR SEMICONDUCTOR DEVICE, AND HIGH-ENERGY PARTICLE BEAM LITHOGRAPHY DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/077586
Kind Code:
A1
Abstract:
The present invention relates to a machining control method for a semiconductor device, and a high-energy particle beam lithography device. The method comprises: by means of a pixel point recognition policy, recognizing, from an i-th layer of grayscale picture to a j-th layer of grayscale picture, first pixel points to be adjusted that can be engraved in a combined manner, and recognizing, from an (i-1)-th layer of grayscale picture, second pixel points to be adjusted that have the same coordinates as said first pixel points and can be engraved together; on the basis of a first grayscale value adjustment policy, adjusting grayscale values of said first pixel points in the (i-1)-th layer of grayscale picture to a (j-1)-th layer of grayscale picture, and grayscale values of said second pixel points; and on the basis of a second grayscale value adjustment policy, adjusting grayscale values of said first pixel points in the j-th layer of grayscale picture, such that when an (i-1)-th material layer to a (j-1)-th material layer are engraved, patterns formed by said second pixel points and first pixel points to be engraved are not engraved, and when a j-th material layer is engraved, the patterns are engraved together in a combined manner to the corresponding j-th material layer to the (i-1)-th material layer. Compared with the prior art, the method can improve the machining efficiency of a semiconductor device, thereby reducing the machining cost.
Inventors:
ZHANG QIHUA (CN)
CHIEN WEI-TING KARY (CN)
JIANG JUNHAO (CN)
HONG LIU (CN)
ZHANG YONGWEI (CN)
YUAN YUAN (CN)
ZHANG JIE (CN)
CHIEN WEI-TING KARY (CN)
JIANG JUNHAO (CN)
HONG LIU (CN)
ZHANG YONGWEI (CN)
YUAN YUAN (CN)
ZHANG JIE (CN)
Application Number:
PCT/CN2022/125291
Publication Date:
April 18, 2024
Filing Date:
October 14, 2022
Export Citation:
Assignee:
YUAN YUAN (CN)
International Classes:
H01L21/033; H01J37/317
Foreign References:
| CN114927410A | 2022-08-19 | |||
| CN105826463A | 2016-08-03 | |||
| CN109923479A | 2019-06-21 | |||
| US20120244458A1 | 2012-09-27 | |||
| US20170278672A1 | 2017-09-28 |
Attorney, Agent or Firm:
GUANGZHOU JUNCY INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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