Title:
LONG-LIFE SPUTTERING TARGET MATERIAL AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/088252
Kind Code:
A1
Abstract:
A long-life sputtering target material and a preparation method therefor. The long-life sputtering target material comprises a sputtering layer and a reinforcement layer which are integrally formed, the front surface of the target material being the sputtering layer, and the back surface of the target material being the reinforcement layer; the reinforcement layer is located on the back surface of the sputtering layer, the hardness of the reinforcement layer is greater than that of the sputtering layer, the thickness of the reinforcement layer is greater than 3mm, and the thickness of the reinforcement layer is not greater than 1/2 of the total thickness of the long-life sputtering target material. The preparation method comprises forging, rolling deformation processing, recrystallization annealing treatment, cutting processing, fixed mounting, friction stir severe plastic deformation processing, finish processing, etc The target material does not require an additional back plate, thereby avoiding the need for a costly and complex diffusion welding process; the process is simple and flexible, and friction stir processing enables severe plastic deformation strengthening with a depth of 10mm or more, far higher than that of a surface strengthening technology. The present method enables precise control of the thickness and area of the reinforcement layer with a simple process and low costs, and the prepared target material exhibits a significantly prolonged service life compared to conventional target materials.
Inventors:
HE JINJIANG (CN)
WANG XINGQUAN (CN)
LV BAOGUO (CN)
DING ZHAOCHONG (CN)
JIA QIAN (CN)
TENG HAITAO (CN)
GUO SHANSHAN (CN)
ZHU ZIYI (CN)
WANG XINGQUAN (CN)
LV BAOGUO (CN)
DING ZHAOCHONG (CN)
JIA QIAN (CN)
TENG HAITAO (CN)
GUO SHANSHAN (CN)
ZHU ZIYI (CN)
Application Number:
PCT/CN2023/126200
Publication Date:
May 02, 2024
Filing Date:
October 24, 2023
Export Citation:
Assignee:
GRIKIN ADVANCED MAT CO LTD (CN)
GRIKIN SHANDONG ADVANCED MAT CO LTD (CN)
GRIKIN SHANDONG ADVANCED MAT CO LTD (CN)
International Classes:
C23C14/34; B23P15/00; C22F1/04; C22F1/08; C22F1/10; C22F1/14
Attorney, Agent or Firm:
CN-KNOWHOW INTELLECTUAL PROPERTY AGENT LIMITED (CN)
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