Title:
LIQUID RAW MATERIAL VAPORIZER
Document Type and Number:
WIPO Patent Application WO/2010/122972
Kind Code:
A1
Abstract:
A liquid raw material vaporizer which minimizes the bloating of bubbles by preventing recombination of bubbles and equalizes the temperature distribution of stored liquid raw material comprises a liquid raw material container (2), a first heater (3) mounted on the sidewall of the liquid raw material container (2) in order to heat the stored liquid raw material to a predetermined temperature, a second heater (4) provided at the central part in the liquid raw material container (2) in order to heat the stored liquid raw material to a predetermined temperature, a plurality of bubble generators (5) provided between the second heater (4) and the sidewall while being immersed in the stored liquid raw material in order to bubble the liquid raw material by discharging carrier gas into the liquid raw material, and a gas supply pipe (6) which supplies carrier gas to the bubble generators (5).
Inventors:
IEKI TAKAYUKI (JP)
HAYASHI TATSUYA (JP)
HAYASHI TATSUYA (JP)
Application Number:
PCT/JP2010/056908
Publication Date:
October 28, 2010
Filing Date:
April 19, 2010
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
IEKI TAKAYUKI (JP)
HAYASHI TATSUYA (JP)
IEKI TAKAYUKI (JP)
HAYASHI TATSUYA (JP)
International Classes:
C23C16/448; B01J7/02; H01L21/31
Foreign References:
| JP2002131113A | 2002-05-09 | |||
| JPH05138008A | 1993-06-01 | |||
| JPH04218675A | 1992-08-10 | |||
| JPH06267852A | 1994-09-22 |
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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