Title:
LIQUID LEVEL GAUGE AND LIQUID RAW MATERIAL VAPORIZATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/075892
Kind Code:
A1
Abstract:
[Problem] To provide a liquid level gauge and a liquid raw material vaporization device with which the flow rate-dependence of the time for detecting a switch from a liquid phase to a vapor phase is reduced, and the detection time shortened. [Solution] The present invention is provided with a chamber 2 for holding a liquid raw material, at least one protective tube 3 housing a resistance temperature device for detecting the liquid level L1 within the chamber 2, and a flow rate control device 4 for controlling the flow rate at which a gas flowing out from the chamber 2 is supplied. The protective tubes 3 are secured inserted in the horizontal direction through a side wall 2a of the chamber 2.
Inventors:
HIDAKA ATSUSHI (JP)
NAGASE MASAAKI (JP)
HIRATA KAORU (JP)
YAMASHITA SATORU (JP)
HIRAO KEIJI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
NAGASE MASAAKI (JP)
HIRATA KAORU (JP)
YAMASHITA SATORU (JP)
HIRAO KEIJI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2015/005498
Publication Date:
May 19, 2016
Filing Date:
November 02, 2015
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
B01J4/00; G01F23/22; C23C16/455; H01L21/31
Foreign References:
| JPS6446716U | 1989-03-22 | |||
| JP2005337627A | 2005-12-08 | |||
| JPS6446717U | 1989-03-22 | |||
| JPH0763592A | 1995-03-10 | |||
| JPH0651834U | 1994-07-15 | |||
| JP2014211345A | 2014-11-13 |
Attorney, Agent or Firm:
TANIDA, Ryuichi et al. (JP)
Ryuichi Yata (JP)
Ryuichi Yata (JP)
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