Title:
LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING DEVICE, AND LIQUID CIRCULATION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/080017
Kind Code:
A1
Abstract:
A liquid circulation system according to one aspect of the present disclosure recovers ionic liquid supplied to inside of a vacuum vessel and returns the ionic liquid back to the inside of the vacuum vessel, the system including: a storage tank that has an opening communicating with the inside of the vacuum vessel, and that stores ionic liquid extracted from the inside of the vacuum vessel through the opening; a viscous pump provided vertically downward relative to the storage tank; and piping that feeds the ionic liquid inside the storage tank to the inside of the vacuum vessel.
Inventors:
OKABE TAKAO (JP)
UEDA HIROKAZU (JP)
UMESHITA NAOKI (JP)
IWASHITA MITSUAKI (JP)
SEKIGUCHI KENJI (JP)
AKIYAMA KOJI (JP)
MORIMOTO TAMOTSU (JP)
AKIMOTO TOSHIKAZU (JP)
UEDA HIROKAZU (JP)
UMESHITA NAOKI (JP)
IWASHITA MITSUAKI (JP)
SEKIGUCHI KENJI (JP)
AKIYAMA KOJI (JP)
MORIMOTO TAMOTSU (JP)
AKIMOTO TOSHIKAZU (JP)
Application Number:
PCT/JP2022/039719
Publication Date:
May 11, 2023
Filing Date:
October 25, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
UNIV TOKYO SCIENCE FOUND (JP)
UNIV TOKYO SCIENCE FOUND (JP)
International Classes:
H01L21/02; B01J3/02
Foreign References:
| JP2020088280A | 2020-06-04 | |||
| JP2014220502A | 2014-11-20 | |||
| JP2018190783A | 2018-11-29 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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