Title:
LIGHT EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/085055
Kind Code:
A1
Abstract:
The purpose of the present invention is to, when a substrate (or substrates) is (are) disposed on a substrate holder for holding the substrate(s), detect the position(s) of the substrate(s) disposed in various forms, in which, for example, the substrate(s) is disposed with the orientation thereof changed or a plurality of substrates are disposed. This light exposure device is provided with: a holding part (201) which holds a plurality of substrates; a plurality of first sensors (210) which detect the respective positions of the plurality of substrates with respect to the holding part (201); a stage part (121) on which the plurality of substrates are disposed; and a plurality of second sensors (150) which detect the respective positions of the plurality of substrates with respect to the stage part (121). The number of the plurality of second sensors (150) is less than the number of the plurality of first sensors (210).
Inventors:
AKIYAMA TAKANOBU (JP)
OHKAWA TOMOYUKI (JP)
OHKAWA TOMOYUKI (JP)
Application Number:
PCT/JP2023/036997
Publication Date:
April 25, 2024
Filing Date:
October 12, 2023
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F9/00; G03F7/20; H01L21/68
Foreign References:
| JP2004273702A | 2004-09-30 | |||
| JP2014027044A | 2014-02-06 | |||
| JP2012129231A | 2012-07-05 | |||
| JP2004107006A | 2004-04-08 | |||
| JP2011233776A | 2011-11-17 | |||
| JP2010027163A | 2010-02-04 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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